Scanning probe microscopy with piezo stages and capacitive nanometrology sensors improves nano-indentation and materials testing systems
Nanoindentation is derived from the classical hardness test but is carried out on a much smaller scale. It can be used to determine the hardness of thin layers as well as material properties such as elasticity, stiffness, plasticity, and tensile strength, or fracture toughness of small objects and microsystems in fields such as biotechnology. These measurements involve applying a small force to a sample using a sharp probe and measuring the resultant penetration depth. The measured value is used to calculate the contact area and hence the particular property of the sample material. Both the method of force application and the geometry of the indentation tip can be adjusted to suit the particular application.